Refrigerated Thermo-chiller HRZ


  • Proven performance with semiconductor process equipment, with a wide range of features such as high temperature stability, wide temperature range, failure testing, external signal.
  • All models conform to safety standards.
  • Conforms to UL and SEMI specifications, CE marking.
SeriesSet temperature rangeCooling capacityTemperature stabilityCooling methodCirculating liquid
HRZ -20 to 40
20 to 90
-20 to 90
15kW ±0.1℃ Water-cooled refrigeration Fluorinated liquid, Clear water, Deionized water, Ethylene glycol aqueous solution

About SMC Corporation Middle East FZE

SMC Corporation Middle East FZE is the United Arab Emirates subsidiary of SMC Corporation, the world’s largest pneumatic automation products manufacturer which was established in Japan and now has more than 50 years of experience. In 2014, SMC Corporation Middle East FZE is established affirming our leading role in pneumatics control equipment & devices as well bringing best services to customers.

While the subsidiary mainly assembles knockdown cylinders, SMC United Arab Emirates also offers a wide range of high quality advanced industrial pneumatic system technology products to meet applications in a myriad of sectors and fields of the market such as semiconductor, automotive, medical, and petrochemical, just to name a few. Products offered here range from actuators like electric actuator, pneumatic actuator and etc, to valves like solenoid valve, pneumatic valve and 2 port valve; from thermo equipment like refrigerated thermo chiller and temperature control equipment, to a variety of electrostatic removal, air dryer and process gas equipment .

Striving to maintain high standards not only in products but also in customer service, SMC United Arab Emirates is equipped with a well-stocked warehouse ensures quick delivery, as well as maintaining high levels of technical services and solid communication network to consistently meet the needs and expectations of our customers.