- Proven performance with semiconductor process equipment, with a wide range of features such as high temperature stability, wide temperature range, failure testing, external signal.
- All models conform to safety standards.
- Conforms to UL and SEMI specifications, CE marking.
|Series||Set temperature range||Cooling capacity||Temperature stability||Cooling method||Circulating liquid|
|HRZ|| -20 to 40|
20 to 90
-20 to 90
|15kW||±0.1℃||Water-cooled refrigeration||Fluorinated liquid, Clear water, Deionized water, Ethylene glycol aqueous solution|